Abstract: Device shrinkage requires continuous tightening of the overlay (OVL) control. Systematic deviation between optical after-develop inspection (ADI) and after-etch inspection (AEI) OVL, known ...
Abstract: This article realizes whole-process predefined-time tracking control in Takagi–Sugeno (T–S) fuzzy Euler–Lagrange systems with zero-error through the ...
Utilize AI to analyze application runtime data (e.g., rendering time, communication latency), obtain optimization suggestions (such as reducing component re-rendering, reusing hardware connections), ...
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